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Size effect on fracture of MEMS materials

หน่วยงาน Central Queensland University, Australia

รายละเอียด

ชื่อเรื่อง : Size effect on fracture of MEMS materials
นักวิจัย : Hu, Xiaozhi. , Duan , Kai.
คำค้น : Weibull distribution. , Fracture mechanics. , Building materials. , Engineering. , Concrete. , Materials. , Strategic basic research. , 861001 Cement and Concrete Materials. , 861099 Ceramics, Glass and Industrial Mineral Products not elsewhere classified. , 090503 Construction Materials. , 091308 Solid Mechanics. , 091599 Interdisciplinary Engineering not elsewhere classified. , Weibull strength distribution -- Silicon -- Polysilicon -- Size effect -- Fracture toughness
หน่วยงาน : Central Queensland University, Australia
ผู้ร่วมงาน : -
ปีพิมพ์ : 2548
อ้างอิง : http://hdl.cqu.edu.au/10018/40227 , cqu:5140
ที่มา : Hu, X & Duan K, 2005, 'Size effect on fracture on MEMS materials', Journal of Materials Science & Technology, vol. 21, suppl. 1, pp. 47-50.
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Journal of materials science and technology. China. : Zhongguo Kexueyuan, Jinshu Yanjiusuo, 2005. Vol. 21, Suppl. 1 (2005), p. 47-50 4 pages Refereed 1005-0302 , ACQUIRE [electronic resource] : Central Queensland University Institutional Repository.
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Weibull strength distributions of single crystal silicon and polysilicon measured from micro-specimens are analyzed by a simple flaw statistics model. The model can be used to determine important material properties such as the nana- / micro-flaw density and flaw size distribution from the common Weibull parameters. The fracture toughness of single Si should be used for both single crystal Si and polysilicon MEMS structures as it controls fracture initiated form the nano- / micro-flaws. The fracture toughness measured from micro-specimens of polysilicon needs to be treated with caution as it may be subjected to size effect as the microcrack length is comparable to the grain size. The comparison of AFM measurements and predictions of the flaw density based on various toughness results has been used to confirm the size effect.

บรรณานุกรม :
Hu, Xiaozhi. , Duan , Kai. . (2548). Size effect on fracture of MEMS materials.
    กรุงเทพมหานคร : Central Queensland University, Australia.
Hu, Xiaozhi. , Duan , Kai. . 2548. "Size effect on fracture of MEMS materials".
    กรุงเทพมหานคร : Central Queensland University, Australia.
Hu, Xiaozhi. , Duan , Kai. . "Size effect on fracture of MEMS materials."
    กรุงเทพมหานคร : Central Queensland University, Australia, 2548. Print.
Hu, Xiaozhi. , Duan , Kai. . Size effect on fracture of MEMS materials. กรุงเทพมหานคร : Central Queensland University, Australia; 2548.