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The influence of titanium nitride barrier layer on the properties of CNT bundles

หน่วยงาน Nanyang Technological University, Singapore

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ชื่อเรื่อง : The influence of titanium nitride barrier layer on the properties of CNT bundles
นักวิจัย : Yap, Chin Chong , Tan, Dunlin , Brun, Christophe , Li, Hong , Teo, Edwin Hang Tong , Dominique, Baillargeat , Tay, Beng Kang
คำค้น : DRNTU::Engineering::Electrical and electronic engineering
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2556
อ้างอิง : Yap, C. C., Tan, D., Brun, C., Li, H., Teo, E. H. T., Dominique, B., et al. (2013). The influence of titanium nitride barrier layer on the properties of CNT bundles. 2013 IEEE 5th International Nanoelectronics Conference (INEC), 4-6. , http://hdl.handle.net/10220/17371 , http://dx.doi.org/10.1109/INEC.2013.6465937
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : -
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

The use of carbon nanotubes (CNTs) for electrical interconnections is hinder by the possibility of growing CNT directly onto metallization. The introduction of barrier layer between catalyst and metallization is thus essential to permit the direct growth of vertically aligned CNT bundles using CVD approaches. As a result, the resultant CNT bundle resistivity is not only a function of the densities and quality of CNT growth, but is also affected by the thickness and resistivity of the barrier layer. CNT is growth on different thickness of TiN with 2 different underlying layers (Au and SiO2). It was observed that the length of CNT grown on Au is independent of TiN thickness, whereas the height decreases for Au underlayers case. In both scenarios, both have well aligned CNTs growth when the thickness of TiN is <; 90nm.

บรรณานุกรม :
Yap, Chin Chong , Tan, Dunlin , Brun, Christophe , Li, Hong , Teo, Edwin Hang Tong , Dominique, Baillargeat , Tay, Beng Kang . (2556). The influence of titanium nitride barrier layer on the properties of CNT bundles.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Yap, Chin Chong , Tan, Dunlin , Brun, Christophe , Li, Hong , Teo, Edwin Hang Tong , Dominique, Baillargeat , Tay, Beng Kang . 2556. "The influence of titanium nitride barrier layer on the properties of CNT bundles".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Yap, Chin Chong , Tan, Dunlin , Brun, Christophe , Li, Hong , Teo, Edwin Hang Tong , Dominique, Baillargeat , Tay, Beng Kang . "The influence of titanium nitride barrier layer on the properties of CNT bundles."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2556. Print.
Yap, Chin Chong , Tan, Dunlin , Brun, Christophe , Li, Hong , Teo, Edwin Hang Tong , Dominique, Baillargeat , Tay, Beng Kang . The influence of titanium nitride barrier layer on the properties of CNT bundles. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2556.