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An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives
นักวิจัย : Yang, J. P. , Lau, Gih Keong , Tan, C. P. , Chong, Nyok-Boon , Thubthimthong, Borriboon , He, Z. M.
คำค้น : DRNTU::Engineering::Mechanical engineering.
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2555
อ้างอิง : Yang, J. P., Lau, G. K., Tan, C. P., Chong, N.-B., Thubthimthong, B., & He, Z. M. (2012). An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives. Sensors and Actuators A: Physical, 187, 98-104. , 0924-4247 , http://hdl.handle.net/10220/12127 , http://dx.doi.org/10.1016/j.sna.2012.08.009
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Sensors and actuators A : physical
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

This paper presents an electro-thermal micro-actuator based on polymer composite for dual-stage head positioning systems in hard disk drives (HDDs). This micro-actuator has a pair of benders, which are made of silicon–polymer composite. When electro-thermally activated by resistive heating, the composite expands and consequently the benders produce a lateral bending motion to drive a femto slider, which carries a magnetic read/write head. The micro-actuator has been fabricated by deep silicon etching and polymer patterning. Experiment shows that the micro-actuator can drive up to 35 nm peak-to-peak displacement when it is activated by a 3.25 V half-sine input voltage at 500 Hz under a moderate temperature rise. The first in-plane mechanical resonant frequency is measured to occur at 36.8 kHz. Analytical and finite element models were developed to simulate the micro-actuator performance. It is noted that the simulation results agree well with the experimental measurement. With good performance, the electro-thermal micro-actuator are useful for high bandwidth dual-stage positioning systems in future high-density HDDs.

บรรณานุกรม :
Yang, J. P. , Lau, Gih Keong , Tan, C. P. , Chong, Nyok-Boon , Thubthimthong, Borriboon , He, Z. M. . (2555). An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Yang, J. P. , Lau, Gih Keong , Tan, C. P. , Chong, Nyok-Boon , Thubthimthong, Borriboon , He, Z. M. . 2555. "An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Yang, J. P. , Lau, Gih Keong , Tan, C. P. , Chong, Nyok-Boon , Thubthimthong, Borriboon , He, Z. M. . "An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print.
Yang, J. P. , Lau, Gih Keong , Tan, C. P. , Chong, Nyok-Boon , Thubthimthong, Borriboon , He, Z. M. . An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.