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Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
นักวิจัย : Shen, Zhiyuan , Olfatnia, Mohammad , Miao, Jianmin , Wang, Zhihong
คำค้น : -
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2555
อ้างอิง : Shen, Z., Olfatnia, M., Miao, J., & Wang, Z. (2012). Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode. Smart Materials and Structures, 21(5). , 0964-1726 , http://hdl.handle.net/10220/12044 , http://dx.doi.org/10.1088/0964-1726/21/5/055001
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Smart materials and structures
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. A double-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6 nm V−1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm.

บรรณานุกรม :
Shen, Zhiyuan , Olfatnia, Mohammad , Miao, Jianmin , Wang, Zhihong . (2555). Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Shen, Zhiyuan , Olfatnia, Mohammad , Miao, Jianmin , Wang, Zhihong . 2555. "Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Shen, Zhiyuan , Olfatnia, Mohammad , Miao, Jianmin , Wang, Zhihong . "Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print.
Shen, Zhiyuan , Olfatnia, Mohammad , Miao, Jianmin , Wang, Zhihong . Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.