ridm@nrct.go.th   ระบบคลังข้อมูลงานวิจัยไทย   รายการโปรดที่คุณเลือกไว้

Phase shift reflectometry for sub-surface defect detection

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Phase shift reflectometry for sub-surface defect detection
นักวิจัย : Asundi, Anand Krishna , Lei, Huang , Teoh, Eden Kang Min , Sreemathy, Parthasarathy , May, Watt Sook
คำค้น : DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2555
อ้างอิง : Asundi, A., Lei, H., Teoh, E. K. M., Sreemathy, P., & May, W. S. (2012). Phase shift reflectometry for sub-surface defect detection. Proceedings of SPIE - Optical Metrology and Inspection for Industrial Applications II, 85630G. , http://hdl.handle.net/10220/10061 , http://dx.doi.org/10.1117/12.1000032
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : -
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Phase Shift Reflectometry has recently been seen as a novel alternative to interferometry since it can provide warpage measurement over large areas with no need for large optical components. To confirm its capability and to explore the use of this method for sub-surface defect detection, a Chinese magic mirror is used. This bronze mirror which dates back to the Chinese Han Dynasty appears at first sight to be an ordinary convex mirror. However, unlike a normal mirror, when illuminated by a beam of light, an image is formed onto a screen. It has been hypothesized that there are indentations inside the mirror which alter the path of reflected light rays and hence the reflected image. This paper explores various methods to measure these indentations. Of the methods test Phase Shift Reflectometry (PSR) was found suitable to be the most suitable both in terms of the sensitivity and the field of view.

บรรณานุกรม :
Asundi, Anand Krishna , Lei, Huang , Teoh, Eden Kang Min , Sreemathy, Parthasarathy , May, Watt Sook . (2555). Phase shift reflectometry for sub-surface defect detection.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Asundi, Anand Krishna , Lei, Huang , Teoh, Eden Kang Min , Sreemathy, Parthasarathy , May, Watt Sook . 2555. "Phase shift reflectometry for sub-surface defect detection".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Asundi, Anand Krishna , Lei, Huang , Teoh, Eden Kang Min , Sreemathy, Parthasarathy , May, Watt Sook . "Phase shift reflectometry for sub-surface defect detection."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print.
Asundi, Anand Krishna , Lei, Huang , Teoh, Eden Kang Min , Sreemathy, Parthasarathy , May, Watt Sook . Phase shift reflectometry for sub-surface defect detection. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.