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Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining
นักวิจัย : Mirshekarloo, Meysam Sharifzadeh , Zhang, Lei , Yao, Kui , Sritharan, Thirumany
คำค้น : -
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2555
อ้างอิง : Mirshekarloo, M. S., Zhang, L., Yao, K., & Sritharan, T. (2012). Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining. Sensors and Actuators A: Physical, 187, 127-131. , 0924-4247 , http://hdl.handle.net/10220/9397 , http://dx.doi.org/10.1016/j.sna.2012.08.024
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Sensors and Actuators A: Physical
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Electromechanical cantilevers comprising antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 (PLZST) thin films were fabricated through bulk micro-machining process on silicon wafers, and their electromechanical properties including strain-fatigue behaviors of the antiferroelectric thin film cantilevers were investigated. The antiferroelectric cantilevers showed the distinct digital actuation characteristics with the strain generated due to the antiferroelectric–ferroelectric transformation. The maximum displacement per unit voltage around the phase switching field reached 16.7 μm/V, significantly larger than the typical piezoelectric cantilevers. Moreover, the antiferroelectric PLZST cantilevers exhibited superior strain-fatigue resistance compared to the similar piezoelectric microstructures. These results show the promising future of antiferroelectric materials in micro electromechanical systems.

บรรณานุกรม :
Mirshekarloo, Meysam Sharifzadeh , Zhang, Lei , Yao, Kui , Sritharan, Thirumany . (2555). Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Mirshekarloo, Meysam Sharifzadeh , Zhang, Lei , Yao, Kui , Sritharan, Thirumany . 2555. "Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Mirshekarloo, Meysam Sharifzadeh , Zhang, Lei , Yao, Kui , Sritharan, Thirumany . "Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print.
Mirshekarloo, Meysam Sharifzadeh , Zhang, Lei , Yao, Kui , Sritharan, Thirumany . Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.