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A general lithography-free method of micro/nanoscale fabrication and patterning on Si and Ge surfaces

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : A general lithography-free method of micro/nanoscale fabrication and patterning on Si and Ge surfaces
นักวิจัย : Wang, Huatao , Wu, Tom
คำค้น : -
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2555
อ้างอิง : Wang, H., & Wu, T. (2012). A general lithography-free method of micro/nanoscale fabrication and patterning on Si and Ge surfaces. Nanoscale Research Letters, 7(1), 110. , 1556-276X , http://hdl.handle.net/10220/9189 , http://dx.doi.org/10.1186/1556-276X-7-110
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Nanoscale research letters
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Here, we introduce and give an overview of a general lithography-free method to fabricate silicide and germanide micro-/nanostructures on Si and Ge surfaces through metal-vapor-initiated endoepitaxial growth. Excellent controls on shape and orientation are achieved by adjusting the substrate orientation and growth parameters. Furthermore, micro-/nanoscale pits with controlled morphologies can also be successfully fabricated on Si and Ge surfaces by taking advantage of the sublimation of silicides/germanides. The aim of this brief report is to illustrate the concept of lithography-free synthesis and patterning on surfaces of elemental semiconductors, and the differences and the challenges associated with the Si and the Ge surfaces will be discussed. Our results suggest that this low-cost bottom-up approach is promising for applications in functional nanodevices.

บรรณานุกรม :
Wang, Huatao , Wu, Tom . (2555). A general lithography-free method of micro/nanoscale fabrication and patterning on Si and Ge surfaces.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Wang, Huatao , Wu, Tom . 2555. "A general lithography-free method of micro/nanoscale fabrication and patterning on Si and Ge surfaces".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Wang, Huatao , Wu, Tom . "A general lithography-free method of micro/nanoscale fabrication and patterning on Si and Ge surfaces."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print.
Wang, Huatao , Wu, Tom . A general lithography-free method of micro/nanoscale fabrication and patterning on Si and Ge surfaces. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.