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Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy
นักวิจัย : Li, Shiguang , Liu, Jing , Nguyen, Nam-Trung , Fang, Zhong Ping , Yoon, Soon Fatt
คำค้น : DRNTU::Engineering::Mechanical engineering.
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2552
อ้างอิง : Li, S. G., Liu, J., Nguyen, N. T., Fang, Z. P., & Yoon, S. F. (2009). Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy. Applied Optics, 48(33), 6432-6441. , http://hdl.handle.net/10220/7879 , http://dx.doi.org/10.1364/AO.48.006432
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Applied optics
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also affects the measurement accuracy. In this paper, we first apply the laser fluorescent confocal microscopy and intensity differentiation algorithm to obtain the complete three-dimensional profile of the buried, undercut structures in microfluidic devices, which are made by the soft lithography technique and bonded by the oxygen plasma method. The impact of material wettability and the refractive index (n) mismatch among the liquid, samples, cover layer, and objective on the measurement accuracy are experimentally investigated.

บรรณานุกรม :
Li, Shiguang , Liu, Jing , Nguyen, Nam-Trung , Fang, Zhong Ping , Yoon, Soon Fatt . (2552). Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Li, Shiguang , Liu, Jing , Nguyen, Nam-Trung , Fang, Zhong Ping , Yoon, Soon Fatt . 2552. "Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Li, Shiguang , Liu, Jing , Nguyen, Nam-Trung , Fang, Zhong Ping , Yoon, Soon Fatt . "Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2552. Print.
Li, Shiguang , Liu, Jing , Nguyen, Nam-Trung , Fang, Zhong Ping , Yoon, Soon Fatt . Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2552.