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Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides
นักวิจัย : Lee, Pooi See , Mangelinck, D. , Pey, Kin Leong , Shen, Zexiang , Ding, Jun , Osipowicz, T. , See, A.
คำค้น : DRNTU::Engineering::Materials
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2543
อ้างอิง : Lee, P. S., Mangelinck, D., Pey, K. L., Shen, Z., Ding, J., Osipowicz, T., et al. (2000). Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides. Electrochemical and solid-state letters, 3(3), 153-155. , http://hdl.handle.net/10220/8060 , http://dx.doi.org/10.1149/1.1390986
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Electrochemical and solid-state letters
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

The formation of Ni silicides has been successfully monitored by Raman spectroscopy. Ni silicides formed at different annealing temperatures using rapid thermal annealing were analyzed using Rutherford backscattering spectroscopy and X-ray diffraction. Raman spectroscopy was further used to examine these samples. The results showed that Raman spectroscopy could accurately identify the phases of Ni silicides formed at various temperatures. These findings were used to demonstrate the increased thermal stability of NiSi by the addition of Pt. This study demonstrates the applicability of Raman spectroscopy for monitoring the formation of NiSi, which was suggested to be the future silicide for deep submicrometer integrated circuit processing. Raman spectroscopy offers a unique tool for phase identification at localized areas and mapping characterization of Ni silicides with micrometer spatial resolution.

บรรณานุกรม :
Lee, Pooi See , Mangelinck, D. , Pey, Kin Leong , Shen, Zexiang , Ding, Jun , Osipowicz, T. , See, A. . (2543). Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Lee, Pooi See , Mangelinck, D. , Pey, Kin Leong , Shen, Zexiang , Ding, Jun , Osipowicz, T. , See, A. . 2543. "Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Lee, Pooi See , Mangelinck, D. , Pey, Kin Leong , Shen, Zexiang , Ding, Jun , Osipowicz, T. , See, A. . "Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2543. Print.
Lee, Pooi See , Mangelinck, D. , Pey, Kin Leong , Shen, Zexiang , Ding, Jun , Osipowicz, T. , See, A. . Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicides. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2543.