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Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure
นักวิจัย : Setiawan, Y. , Lee, Pooi See , Pey, Kin Leong , Wang, X. C. , Lim, G. C. , Tan, B. L.
คำค้น : DRNTU::Engineering::Materials::Microelectronics and semiconductor materials.
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2550
อ้างอิง : Setiawan, Y., Lee, P. S., Pey, K. L., Wang, X. C., Lim, G. C., & Tan, B. L. (2007). Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure. Applied Physics Letters, 90(7). , http://hdl.handle.net/10220/8101 , http://dx.doi.org/10.1063/1.2560935
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Applied physics letters
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Laser-induced Ni(Pt) germanosilicide formation on Si1−xGex /Si substrate has resulted in the formation of smooth Ni(Pt) germanosilicide/Si interface with minimum interface roughness which is preferred as a contact material. A confined (self-limiting) melting phenomenon occurred during the laser-induced silicidation process at laser fluence of 0.4 J cm−2 (just at the melting threshold of the sample). This phenomenon is caused by significant differences in material properties of Si1−xGex alloy and Si substrates. Formation of highly textured [Ni1−v(Pt)v](Si1−yGey) phase was detected in the sample after 20-pulsed laser thermal annealing at 0.4 J cm−2. The formation mechanism of the Ni(Pt) monogermanosilicide is discussed.

บรรณานุกรม :
Setiawan, Y. , Lee, Pooi See , Pey, Kin Leong , Wang, X. C. , Lim, G. C. , Tan, B. L. . (2550). Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Setiawan, Y. , Lee, Pooi See , Pey, Kin Leong , Wang, X. C. , Lim, G. C. , Tan, B. L. . 2550. "Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Setiawan, Y. , Lee, Pooi See , Pey, Kin Leong , Wang, X. C. , Lim, G. C. , Tan, B. L. . "Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2550. Print.
Setiawan, Y. , Lee, Pooi See , Pey, Kin Leong , Wang, X. C. , Lim, G. C. , Tan, B. L. . Laser-induced Ni(Pt) germanosilicide formation through a self-limiting melting phenomenon on Si1-xGex/Si heterostructure. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2550.