| ชื่อเรื่อง | : | Effect of electron beam treatment on adhesion of Ta/polymeric low-k interface |
| นักวิจัย | : | Gan, Zhenghao , Chen, Zhong , Mhaisalkar, Subodh Gautam , Damayanti, M. , Chen, Zhe , Prasad, K. , Zhang, Sam , Jiang, Ning |
| คำค้น | : | DRNTU::Engineering::Materials. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2549 |
| อ้างอิง | : | Gan, Z., Chen, Z., Mhaisalkar, S. G., Damayanti, M., Chen, Z., Prasad, K., et. al. (2006). Effect of electron beam treatment on adhesion of Ta/polymeric low-k interface. Applied physics letters, 88 (23). , http://hdl.handle.net/10220/7697 , http://dx.doi.org/10.1063/1.2212533 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Applied physics letters |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | Reliability of the Cu/low-k structure is a serious concern since the metal/dielectric interface is generally weak. The adhesion of the Ta/polyarylene ether interfaces with and without electron beam (EB) treatment was investigated by four-point bending test, x-ray photoelectron spectroscopy, and density functional theory. Higher adhesion energy (Gc) was achieved with low-dose EB treatment, attributed to the strong Ta-arene interaction. However, high-dose EB breaks the aromatic rings partially, resulting in fewer available sites for Ta-arene bonding, leading to lower adhesion. It is suggested that the amount of carbon atoms involved in bonding with the metal is the key to improve the Ta/polymer adhesion. |
| บรรณานุกรม | : |
Gan, Zhenghao , Chen, Zhong , Mhaisalkar, Subodh Gautam , Damayanti, M. , Chen, Zhe , Prasad, K. , Zhang, Sam , Jiang, Ning . (2549). Effect of electron beam treatment on adhesion of Ta/polymeric low-k interface.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Gan, Zhenghao , Chen, Zhong , Mhaisalkar, Subodh Gautam , Damayanti, M. , Chen, Zhe , Prasad, K. , Zhang, Sam , Jiang, Ning . 2549. "Effect of electron beam treatment on adhesion of Ta/polymeric low-k interface".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Gan, Zhenghao , Chen, Zhong , Mhaisalkar, Subodh Gautam , Damayanti, M. , Chen, Zhe , Prasad, K. , Zhang, Sam , Jiang, Ning . "Effect of electron beam treatment on adhesion of Ta/polymeric low-k interface."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2549. Print. Gan, Zhenghao , Chen, Zhong , Mhaisalkar, Subodh Gautam , Damayanti, M. , Chen, Zhe , Prasad, K. , Zhang, Sam , Jiang, Ning . Effect of electron beam treatment on adhesion of Ta/polymeric low-k interface. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2549.
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