ridm@nrct.go.th   ระบบคลังข้อมูลงานวิจัยไทย   รายการโปรดที่คุณเลือกไว้

Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
นักวิจัย : Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui
คำค้น : DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics.
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2553
อ้างอิง : Forleo, A., Francioso, L., Capone, S., Casino, F., Siciliano, P., Tan, O. K., & et al. (2010). Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics. Sensors and Actuators B: Chemical, 154, 283-287. , http://hdl.handle.net/10220/7024 , http://dx.doi.org/10.1016/j.snb.2010.01.010 , 160002
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Sensors and actuators B: chemical
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

SnO2 nanorods were successfully deposited on 3″ Si/SiO2 wafers by inductively coupled plasma-enhanced chemical vapour deposition (PECVD) and a wafer-level patterning of nanorods layer for miniaturized solid state gas sensor fabrication were performed. Uniform needle-shaped SnO2 nanorods in situ grown were obtained under catalyst- and high temperature treatment-free growth condition. These nanorods have an average diameter between 5 and 15 nm and a length of 160–300 nm. The SnO2-nanorods based gas sensors were tested towards NH3 and CH3OH and gas sensing tests show remarkable response, showing promising and repeatable results compared with the SnO2 thin films gas sensors.

บรรณานุกรม :
Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . (2553). Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . 2553. "Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . "Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2553. Print.
Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2553.