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Plasma-induced quantum well intermixing for monolithic photonic integration

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Plasma-induced quantum well intermixing for monolithic photonic integration
นักวิจัย : Djie, Hery Susanto , Mei, Ting
คำค้น : DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2548
อ้างอิง : Djie, H. S., & Mei, T. (2005). Plasma-induced quantum well intermixing for monolithic photonic integration. IEEE Journal of Selected Topics in Quantum Electronics, 11(2), 373-382. , 1077-260X , http://hdl.handle.net/10220/6420 , http://dx.doi.org/10.1109/JSTQE.2005.845611
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : IEEE journal of selected topics in quantum electronics
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Plasma-induced quantum well intermixing (QWI) has been developed for tuning the bandgap of III-V compound semiconductor materials using an inductively coupled plasma system at the postgrowth level. In this paper, we present the capability of the technique for a high-density photonic integration process, which offers three aspects of investigation: 1) universality to a wide range of III-V compound material systems covering the wavelength range from 700 to 1600 nm; 2) spatial resolution of the process; and 3) single-step multiple bandgap creation. To verify the monolithic integration capability, a simple photonic integrated chip has been fabricated using Ar plasma-induced QWI in the form of a two-section extended cavity laser diode, where an active laser is integrated with an intermixed low-loss waveguide.

บรรณานุกรม :
Djie, Hery Susanto , Mei, Ting . (2548). Plasma-induced quantum well intermixing for monolithic photonic integration.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Djie, Hery Susanto , Mei, Ting . 2548. "Plasma-induced quantum well intermixing for monolithic photonic integration".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Djie, Hery Susanto , Mei, Ting . "Plasma-induced quantum well intermixing for monolithic photonic integration."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2548. Print.
Djie, Hery Susanto , Mei, Ting . Plasma-induced quantum well intermixing for monolithic photonic integration. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2548.