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Fabrication of periodic square arrays by angle-resolved nanosphere lithography

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Fabrication of periodic square arrays by angle-resolved nanosphere lithography
นักวิจัย : Lee, Kwang Hong , Chen, Qiu Ling , Yip, Chan Hoe , Yan, Qingfeng , Wong, Chee Cheong
คำค้น : DRNTU::Engineering::Electrical and electronic engineering::Microelectronics.
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2552
อ้างอิง : Lee, K. H., Chen, Q. L., Yip, C. H., Yan, Q., & Wong, C. C. (2009). Fabrication of Periodic Square Arrays by Angle-Resolved Nanosphere Lithography. Microelectronic Engineering, 87(10), 1941-1944. , 0167-9317 , http://hdl.handle.net/10220/6813 , http://dx.doi.org/10.1016/j.mee.2009.11.169 , 142636
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Microelectronics engineering
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

We investigate the fabrication of periodic square arrays of solid gold islands by angle-resolved nanosphere lithography (ARNSL) in conjunction with thermal evaporation and etching. By varying θ (the tilt angle between the direction of gold deposition beam and the substrate surface normal) and (the substrate rotation angle about the beam axis), adjacent islands on a deposited hexagonal gold array will have a constant and periodic difference in height. Upon etching, this height bias will result in the shorter structures being removed to produce an array with a different symmetry from the original hexagonal symmetry of the parent mask. By depositing at three directions of = 0°, 120° and −120° with a constant θ = 20°, experimental results show that deposited two-dimensional gold periodic arrays will have a measurable difference in height between adjacent islands. Etching of the resulting patterns produced periodic near-square arrays with triangular nanostructures. Thus the combination of ARNSL and etching can allow selective periodic nanostructures to be removed, increasing the diversity of array symmetries available through nanosphere lithography.

บรรณานุกรม :
Lee, Kwang Hong , Chen, Qiu Ling , Yip, Chan Hoe , Yan, Qingfeng , Wong, Chee Cheong . (2552). Fabrication of periodic square arrays by angle-resolved nanosphere lithography.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Lee, Kwang Hong , Chen, Qiu Ling , Yip, Chan Hoe , Yan, Qingfeng , Wong, Chee Cheong . 2552. "Fabrication of periodic square arrays by angle-resolved nanosphere lithography".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Lee, Kwang Hong , Chen, Qiu Ling , Yip, Chan Hoe , Yan, Qingfeng , Wong, Chee Cheong . "Fabrication of periodic square arrays by angle-resolved nanosphere lithography."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2552. Print.
Lee, Kwang Hong , Chen, Qiu Ling , Yip, Chan Hoe , Yan, Qingfeng , Wong, Chee Cheong . Fabrication of periodic square arrays by angle-resolved nanosphere lithography. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2552.